System for designing integrated circuit layout and method of making the integrated circuit layout

ABSTRACT

An integrated circuit designing system includes a non-transitory storage medium, the non-transitory storage medium being encoded with a layout of a standard cell corresponding to a predetermined manufacturing process, the predetermined manufacturing process having a nominal minimum pitch of metal lines along a predetermined direction, the layout of the standard cell having a cell height along the predetermined direction, and the cell height is a non-integral multiple of the nominal minimum pitch. The integrated circuit designing system further includes a hardware processor communicatively coupled with the non-transitory storage medium and configured to execute a set of instructions for generating an integrated circuit layout based on the layout of the standard cell and the nominal minimum pitch.

PRIORITY CLAIM

The present application is a divisional of U.S. application Ser. No.15/601,697, filed May 22, 2017, which is a divisional of U.S.application Ser. No. 14/253,205, filed Apr. 15, 2014, now U.S. Pat. No.9,659,129, issued May 23, 2017, which claims priority of U.S.Provisional Application No. 61/818,705, filed on May 2, 2013, thedisclosures of which are incorporated herein by reference in theirentireties.

RELATED APPLICATIONS

The present application is related to U.S. application Ser. No.14/051,881, filed Oct. 11, 2013, now U.S. Pat. No. 9,501,600, issuedNov. 22, 2016 and U.S. application Ser. No. 14/015,924, filed Aug. 30,2013, now U.S. Pat. No. 9,158,877, issued Oct. 13, 2015, the disclosuresof which are incorporated herein by reference in their entireties.

BACKGROUND

In the design of an integrated circuit, standard cells havingpredetermined functions are used. Pre-designed layouts of standard cellsare stored in cell libraries. When designing an integrated circuit, thepre-designed layouts of the standard cells are retrieved from the celllibraries and placed into one or more desired locations on an integratedcircuit layout. Routing is then performed to connect the standard cellswith each other using metal lines. The integrated circuit layout isthereafter used to manufacture the integrated circuit using apredetermined semiconductor manufacturing process.

DESCRIPTION OF THE DRAWINGS

One or more embodiments are illustrated by way of example, and not bylimitation, in the figures of the accompanying drawings, whereinelements having the same reference numeral designations represent likeelements throughout.

FIG. 1 is a top view of an integrated circuit, including an enlargedview of a portion of the integrated circuit, in accordance with one ormore embodiments.

FIG. 2 is a top view of a standard cell in an integrated circuit inaccordance with one or more embodiments.

FIG. 3 is a flow chart of a method of designing an integrated circuitlayout in accordance with one or more embodiments.

FIG. 4 is a functional block diagram of an integrated circuit designingsystem in accordance with one or more embodiments.

DETAILED DESCRIPTION

It is understood that the following disclosure provides one or moredifferent embodiments, or examples, for implementing different featuresof the disclosure. Specific examples of components and arrangements aredescribed below to simplify the present disclosure. These are, ofcourse, examples and are not intended to be limiting. In accordance withthe standard practice in the industry, various features in the drawingsare not drawn to scale and are used for illustration purposes only.

Moreover, spatially relative terms, for example, “lower,” “upper,”“horizontal,” “vertical,” “above,” “below,” “up,” “down,” “top,”“bottom,” “left,” “right,” etc. as well as derivatives thereof (e.g.,“horizontally,” “downwardly,” “upwardly,” etc.) are used for ease of thepresent disclosure of one features relationship to another feature. Thespatially relative terms are intended to cover different orientations ofthe device including the features.

FIG. 1 is a top view of an integrated circuit 100, including an enlargedview 110 of a portion 102 of the integrated circuit, in accordance withone or more embodiments. The integrated circuit 100 includes a pluralityof pre-designed circuit blocks also referred to as standard cells(having cell boundaries indicated by reference lines 112 a and 112 balong the Y direction and 112 c and 112 d along the X direction). One ormore layers of interconnection structures, such as metal lines 114 a,114 b, 114 c, 114 d, and 114 e, are formed over the standard cells. Cellboundaries define cell regions of standard cells, and the cell regionsof neighboring standard cells do not overlap. In some embodiments, atleast one layer of the layers of interconnection structures is routedalong a predetermined direction (e.g., the X direction), and at leastanother one layer of the layers of interconnection structures is routedalong another predetermined direction (e.g., the Y direction). In someembodiments, different layers of interconnection structures areconnected by via plugs.

In FIG. 1, details of the standard cells are omitted. In someembodiments, one or more of the standard cells are logic gate cells. Insome embodiments, logic gate cells include AND, OR, NAND, NOR, XOR, INV,AND-OR-Invert (AOI), OR-AND-Invert (OAI), MUX, Flip-flop, BUFF, Latch,delay, or clock cells. In some embodiments, each of the standard cellsincludes at least one active device, such as a metal-oxide semiconductorfield effect transistor, a junction field effect transistor, a bipolarjunction transistor, or other suitable active device.

Metal lines 114 a, 114 b, 114 c, 114 d, and 114 e extend along the Xdirection and overlap corresponding virtual grid lines 116 a, 116 b, 116c, 116 d, and 116 e. Virtual grid line 116 d coincides with cellboundary 112 d. Virtual grid lines 116 a-e and other virtual grid lines118 a-f are arranged in parallel along the X direction, and two adjacentlines of the plurality of virtual grid lines 116 a-e and 118 a-f areseparated by a nominal minimum pitch T (FIG. 2). The nominal minimumpitch T is a predetermined minimum routing pitch of metal lines forforming an interconnection structure according to a predeterminedsemiconductor manufacturing process. In some embodiments, the nominalminimum pitch T is determined according to one or more characteristicsof the predetermined semiconductor manufacturing process, including awave length for a lithographic process, a selectivity of an etchingprocess, a material of the metal lines, a reasonable tolerance oferrors, and an expected yield rate of the predetermined semiconductormanufacturing process. In a place and routing software tool, the metallines of an integrated circuit layout along the X direction are arranged(also known as “routing”) according to the virtual grid lines 116 a-eand 118 a-f.

In some embodiments, each of the metal lines 114 a-e includes amulti-layer structure including at least one barrier layer and aconductive layer. In some embodiments, one or more of the metal linesare replaceable by conductive lines including a non-metal conductivematerial.

FIG. 2 is a top view of a standard cell 200 in an integrated circuit inaccordance with one or more embodiments. Standard cell 200 includes anN-type active region 212 for forming one or more P-type transistors anda P-type active region 214 for forming one or more N-type transistors.Standard cell 200 also includes conductive lines 222, 224, and 226 andpower lines 232 and 234 connecting the one or more P-type transistorsand the one or more N-type transistors to perform a predeterminedfunction. In the embodiment depicted in FIG. 2, an upper cell boundary242 is defined in the middle of a portion of power line 232 extendingalong the X direction, and a lower cell boundary 244 is defined in themiddle of a portion of power line 234 extending along the X direction.

A plurality of virtual grid lines 252 a-252 j arranged in parallel alongthe X direction and sequentially arranged along the Y directionperpendicular to the direction X are also depicted in FIG. 2. Asdescribed in conjunction with FIG. 1, two adjacent lines of theplurality of virtual grid lines 252 a-252 j are separated by the nominalminimum pitch T.

Only one standard cell 200 and 10 virtual grid lines 252 a-252 j aredepicted in FIG. 2. For an integrated circuit including the standardcell 200, other standard cells and virtual grid lines are omitted inFIG. 2 to avoid obscuring the explanation of the present disclosure. Aperson having ordinary skill in the art would appreciate that one ormore other standard cells are adjacent to the standard cell 200, and oneor more virtual grid lines are defined over the integrated circuitincluding the standard cell 200. Also, a person having ordinary skill inthe art would appreciate that the standard cell 200 is usable as astandard cell of the integrated circuit 100 depicted in FIG. 1.

The standard cell 200 has a cell height H along the Y direction, whichis defined as a distance between the upper cell boundary 242 and thelower cell boundary 244. The cell height H is a non-integral multiple ofthe nominal minimum pitch T. In the embodiment depicted in FIG. 2, thecell height H of the standard cell 200 is 7.5 T. In other words, a ratioof the cell height H to the nominal minimum pitch T is 7.5. In someembodiments, a ratio of the cell height H to the nominal minimum pitch Tranges from 6 to 16. In some embodiments, a ratio of the cell height tothe nominal minimum pitch is p/q, and p and q are integers. In theembodiment depicted in FIG. 2, the lower cell boundary 244 is on one ofthe virtual grid lines 252 i (i.e., on-grid), and the upper cellboundary 242 is not on any of the virtual grid line 252 a-j (i.e.,off-grid). In some embodiments, the upper cell boundary 242 is on-grid,and the lower cell boundary is off-grid. In some embodiments, both uppercell boundary 242 and lower cell boundary 244 are off-grid.

Conductive lines 222, 224, and 226 are configured to be connected tometal lines outside the standard cell 200, and thus are identified asinput/output ports of the standard cell 200. In some embodiments, allconductive lines 222, 224, and 226 identified as input/output ports ofthe standard cell 200 overlap with one or more corresponding virtualgrid lines (252 d-252 f for conductive line 222; 252 c-252 g forconductive line 224; and 252 f for conductive line 226).

In addition, a plurality of metal lines (such as metal lines 114 a-e inFIG. 1) is over the standard cell 200 and extends along the X direction.In some embodiments, the plurality of metal lines being separated, inthe Y direction perpendicular to the X direction, by integral multiplesof the nominal minimum pitch T.

Compared with designing standard cells that have cell heights beingintegral multiples of the nominal minimum pitch T, a circuit designerhas more flexibility in designing the standard cell 200 as depicted inFIG. 2. For example, if a standard cell having a cell height of 7.5 Thas already met a predetermined performance specification, the circuitdesigner need not enlarge the size of the standard cell to have a cellheight of 8 T just for making the standard cell height an integralmultiple of the nominal minimum pitch T. In many application, comparedwith using the counterparts having integral multiples of the nominalminimum pitch T cell heights, an integrated circuit using standard cellshaving non-integral multiples of the nominal minimum pitch T cellheights further reduce the overall die size of the integrated circuit.

FIG. 3 is a flow chart of a method 300 of designing an integratedcircuit layout in accordance with one or more embodiments. It isunderstood that additional operations may be performed before, during,and/or after the method 300 depicted in FIG. 3, and that some otherprocesses may only be briefly described herein.

In order to manufacture the integrated circuit including a standard cellas described above in conjunction with the standard cell 200 depicted inFIG. 2 using a predetermined manufacturing process, an integratedcircuit layout (414 a in FIG. 4) is generated based on a circuit design(414 b) stored in a schematic format or a circuit description languageformat.

In operation 310, as depicted in FIGS. 3 and 2, a hardware computer,based on the circuit design, receives a layout of a standard cell 200.The standard cell is designed corresponding to the predeterminedmanufacturing process, and the predetermined manufacturing process has anominal minimum pitch T, along a direction Y, of metal lines. The layoutof the standard cell 200 has a cell height H along direction Y, and thecell height H is a non-integral multiple of the nominal minimum pitch T.

In some embodiments, a ratio of the cell height H to the nominal minimumpitch T ranges from 6 to 16. In some embodiments, a ratio of the cellheight H to the nominal minimum pitch T is 7.5. In some embodiments, aratio of the cell height to the nominal minimum pitch is p/q, and p andq are integers.

In operation 320, as depicted in FIGS. 3 and 2, a plurality of virtualgrid lines (such as virtual grid lines 252 a-j) sequentially arrangedalong a direction X perpendicular to a Y direction is defined. Twoadjacent lines of the plurality of virtual grid lines are separated bythe nominal minimum pitch T.

In operation 330, as depicted in FIGS. 3 and 2, the layout of thestandard cell 200 is placed for forming the integrated circuit layout ina manner such that, in at least one embodiment, all input/output signalports (i.e., conductive lines 222, 224, and 226) of the standard cell200 overlap a first set of the virtual grid lines 252 c-252 g. In someembodiments, one of the upper cell boundary 242 and the lower cellboundary 244 coincides with one of the plurality of virtual grid lines252 a-j, and the other one of the upper cell boundary 242 and the lowercell boundary 244 does not coincide with any of the plurality of virtualgrid lines 252 a-j.

In operation 340, as depicted in FIGS. 3 and 1, layout patterns of oneor more metal lines (such as metal lines 114 a-114 e) are placed forforming the integrated circuit layout in a manner that the layoutpatterns of the one or more metal lines overlap a second set of thevirtual grid lines 116 a-e.

In some embodiments, the standard cell is a logic gate cell. In someembodiments, the logic gate cell is an AND, OR, NAND, NOR, XOR, AOI,OAI, MUX, Flip-flop, BUFF, Latch, INV, delay, or clock cell.

FIG. 4 is a functional block diagram of an integrated circuit designingsystem 400 in accordance with one or more embodiments. Integratedcircuit designing system 400 includes a first computer system 410, asecond computer system 420, a networked storage device 430, and anetwork 440 connecting the first computer system 410, the secondcomputer system 420, and the networked storage device 430. In someembodiments, one or more of the second computer system 420, the storagedevice 430, and the network 440 are omitted.

The first computer system 410 includes a hardware processor 412communicatively coupled with a non-transitory, computer readable storagemedium 414 encoded with, i.e., storing, a generated integrated layout414 a, a circuit design 414 b, and a computer program code 414 c, i.e.,a set of executable instructions. The processor 412 is electricallycoupled to the computer readable storage medium 414. The processor 412is configured to execute a set of instructions 414 c encoded in thecomputer readable storage medium 414 in order to cause the computer 410to be usable as a placing and routing tool for performing a portion orall of the operations as depicted in FIG. 3. In at least one embodiment,the hardware processor 412 is configured to execute the set ofinstructions 414 c for generating the integrated circuit layout based onthe layout of the standard cell and a nominal minimum pitchcorresponding to a predetermined semiconductor manufacturing process.

In some embodiments, the processor 412 is a central processing unit(CPU), a multi-processor, a distributed processing system, anapplication specific integrated circuit (ASIC), and/or a suitableprocessing unit.

In some embodiments, the computer readable storage medium 414 is anelectronic, magnetic, optical, electromagnetic, infrared, and/or asemiconductor system (or apparatus or device). For example, the computerreadable storage medium 414 includes a semiconductor or solid-statememory, a magnetic tape, a removable computer diskette, a random accessmemory (RAM), a read-only memory (ROM), a rigid magnetic disk, and/or anoptical disk. In some embodiments using optical disks, the computerreadable storage medium 414 includes a compact disk-read only memory(CD-ROM), a compact disk-read/write (CD-R/W), and/or a digital videodisc (DVD).

In some embodiments, the storage medium 414 stores the computer programcode 414 c configured to cause the first computer system 410 to performa method 300 as depicted in FIG. 3. In some embodiments, the storagemedium 414 also stores information needed for performing the method 300or generated during performing the method 300, such as the generatedintegrated circuit layout 414 a, the original circuit design 414 b,and/or a library 414 d including a layout of a standard cell 200.

The computer system 410 includes, in at least some embodiments, aninput/output interface 416 and a display unit 417. The input/outputinterface 416 is coupled to the controller 412 and allows the circuitdesigner to manipulate the first computer system 410 in order to performthe method depicted in FIG. 3. In at least some embodiments, the displayunit 417 displays the status of operation of the method depicted in FIG.3 in a real-time manner and preferably provides a Graphical UserInterface (GUI). In at least some embodiments, the input/outputinterface 416 and the display 417 allow an operator to operate thecomputer system 410 in an interactive manner.

In at least some embodiments, the computer system 410 also includes anetwork interface 418 coupled to the processor 412. The networkinterface 418 allows the computer system 410 to communicate with network440, to which one or more other computer systems 420 and networkedstorage device 430 are connected. The network interface includeswireless network interfaces such as BLUETOOTH, WIFI, WIMAX, GPRS, orWCDMA; or wired network interface such as ETHERNET, USB, or IEEE-1394.In some embodiments, the method of FIG. 3 is implemented in two or morecomputer systems 410 and 420 and/or networked storage device 430, andinformation such as the original circuit design, the standard celllibrary, and/or the generated integrated circuit layout are exchangedbetween different computer systems 410 and 420 and/or networked storagedevice 430 via the network 440.

An aspect of this description relates to an integrated circuit designingsystem. The integrated circuit designing system includes anon-transitory storage medium, the non-transitory storage medium beingencoded with a layout of a standard cell corresponding to apredetermined manufacturing process, the predetermined manufacturingprocess having a nominal minimum pitch of metal lines along apredetermined direction, the layout of the standard cell having a cellheight along the predetermined direction, and the cell height is anon-integral multiple of the nominal minimum pitch. The integratedcircuit designing system further includes a hardware processorcommunicatively coupled with the non-transitory storage medium andconfigured to execute a set of instructions for generating an integratedcircuit layout based on the layout of the standard cell and the nominalminimum pitch. In some embodiments, a ratio of the cell height to thenominal minimum pitch ranges from 6 to 16. In some embodiments, theratio of the cell height to the nominal minimum pitch is 7.5. In someembodiments, a ratio of the cell height to the nominal minimum pitch isp/q, and p and q are integers. In some embodiments, the standard cell isa logic gate cell. In some embodiments, the logic gate cell is an AND,OR, NAND, NOR, XOR, AOI, OAI, MUX, Flip-flop, BUFF, Latch, INV, delay,or clock cell. In some embodiments, the hardware processor, whileexecuting the set of instructions, is configured to: generate aplurality of virtual grid lines in parallel with the a directionperpendicular to the predetermined direction, adjacent two of theplurality of virtual grid lines are separated by the nominal minimumpitch; place the layout of the standard cell for the integrated circuitlayout, all input/output signal ports of the standard cell overlapping afirst set of the virtual grid lines; and place layout patterns of one ormore metal lines for the integrated circuit layout, the layout patternsof the one or more metal lines overlapping a second set of the virtualgrid lines.

An aspect of this description relates to a method of making anintegrated circuit, the method. The method includes arranging aplurality of virtual grid lines, wherein adjacent virtual grid lines ofthe plurality of virtual grid lines are separated, in a first direction,by a minimum nominal pitch determined by a manufacturing process formanufacturing the integrated circuit. The method includes placing astandard cell such that at least one of an upper boundary of thestandard cell or a lower boundary of the standard cell is offset fromevery virtual grid line of the plurality of virtual grid lines. Themethod includes placing at least one metal line over each input/output(I/O) signal port of the standard cell to define an integrated circuitlayout. In some embodiments, placing the standard cell comprises placingthe standard cell so that every I/O signal port of the standard celloverlaps at least one virtual grid line of the plurality of virtual gridlines. In some embodiments, placing the standard cell comprises placingthe standard cell so that both the upper boundary and the lower boundaryare offset from every virtual gird line of the plurality of virtual gridlines. In some embodiments, receiving the standard cell, wherein thestandard cell has a height which is a non-integral multiple of theminimum nominal pitch. In some embodiments, placing the standard cellcomprises placing the standard cell so that at least one I/O signal portof the standard cell overlaps multiple virtual grid lines of theplurality of virtual grid lines. In some embodiments, placing thestandard cell comprises placing the standard cell so that a plurality ofI/O signal ports of the standard cell overlaps a first virtual grid lineof the plurality of virtual grid lines. In some embodiments, the methodfurther includes manufacturing the integrated circuit based on theintegrated circuit layout.

An aspect of this description relates to a method of making anintegrated circuit. The method includes placing a first standard cell ina layout, wherein the layout comprises a plurality of virtual gridlines, wherein adjacent virtual grid lines are separated in a firstdirection by a minimum nominal pitch determined by a manufacturingprocess for manufacturing the integrated circuit. The method includesplacing a second standard cell in the layout, wherein the secondstandard cell defines an interface with the first standard cell, and theinterface is between adjacent virtual gird lines of the plurality ofvirtual grid lines. The method includes placing at least one metal lineover each input/output (I/O) signal port of the standard cell to definean integrated circuit layout. In some embodiments, the method furtherincludes manufacturing the integrated circuit based on the integratedcircuit layout. In some embodiments, the method further includes placinga third standard cell in the layout, wherein the third cell defines asecond interface with the second standard cell, and the second interfaceis offset from each virtual grid line of the plurality of grid lines. Insome embodiments, the method further includes placing a power line alongthe interface. In some embodiments, placing the power line comprisesplacing the power line having a projection, wherein the projectionextends across a virtual grid line of the plurality of virtual gridlines. In some embodiments, placing the first standard cell comprising aplurality of conductive lines, and each conductive line of the pluralityof conductive lines extends across at least one virtual gird line of theplurality of virtual grid lines.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A method of making an integrated circuit, themethod comprising: arranging a plurality of virtual grid lines, whereinadjacent virtual grid lines of the plurality of virtual grid lines areseparated, in a first direction, by a minimum nominal pitch determinedby a manufacturing process for manufacturing the integrated circuit;placing a standard cell such that at least one of an upper boundary ofthe standard cell or a lower boundary of the standard cell is offsetfrom every virtual grid line of the plurality of virtual grid lines; andplacing at least one metal line over each input/output (I/O) signal portof the standard cell to define an integrated circuit layout.
 2. Themethod of claim 1, wherein placing the standard cell comprises placingthe standard cell so that every I/O signal port of the standard celloverlaps at least one virtual grid line of the plurality of virtual gridlines.
 3. The method of claim 1, wherein placing the standard cellcomprises placing the standard cell so that both the upper boundary andthe lower boundary are offset from every virtual gird line of theplurality of virtual grid lines.
 4. The method of claim 1, furthercomprising receiving the standard cell, wherein the standard cell has aheight which is a non-integral multiple of the minimum nominal pitch. 5.The method of claim 1, wherein placing the standard cell comprisesplacing the standard cell so that at least one I/O signal port of thestandard cell overlaps multiple virtual grid lines of the plurality ofvirtual grid lines.
 6. The method of claim 1, wherein placing thestandard cell comprises placing the standard cell so that a plurality ofI/O signal ports of the standard cell overlaps a first virtual grid lineof the plurality of virtual grid lines.
 7. The method of claim 1,further comprising manufacturing the integrated circuit based on theintegrated circuit layout.
 8. A method of making an integrated circuit,the method comprising: placing a first standard cell in a layout,wherein the layout comprises a plurality of virtual grid lines, whereinadjacent virtual grid lines are separated in a first direction by aminimum nominal pitch determined by a manufacturing process formanufacturing the integrated circuit; placing a second standard cell inthe layout, wherein the second standard cell defines an interface withthe first standard cell, and the interface is between adjacent virtualgird lines of the plurality of virtual grid lines; and placing at leastone metal line over each input/output (I/O) signal port of the standardcell to define an integrated circuit layout.
 9. The method of claim 8,further comprising manufacturing the integrated circuit based on theintegrated circuit layout.
 10. The method of claim 8, further comprisingplacing a third standard cell in the layout, wherein the third celldefines a second interface with the second standard cell, and the secondinterface is offset from each virtual grid line of the plurality of gridlines.
 11. The method of claim 8, further comprising placing a powerline along the interface.
 12. The method of claim 11, wherein placingthe power line comprises placing the power line having a projection,wherein the projection extends across a virtual grid line of theplurality of virtual grid lines.
 13. The method of claim 8, whereinplacing the first standard cell comprising a plurality of conductivelines, and each conductive line of the plurality of conductive linesextends across at least one virtual gird line of the plurality ofvirtual grid lines.